ISO 14644-14:2016現行
Cleanrooms and associated controlled environments Part 14: Assessment of suitability for use of equipment by airborne particle concentration
出版：International Organization for Standardization
專家解讀視頻
This part of ISO 14644 specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1.
UNE EN ISO 14644-14 : 2017 - Identical
SN EN ISO 14644-14 : 2016 - Identical
BS EN ISO 14644-14 : 2016 - Identical
SS-EN ISO 14644-14 : 2016 - Identical
NS EN ISO 14644-14 : 2016 - Identical
DS EN ISO 14644-14 : 2016 - Identical
I.S. EN ISO 14644-14:2016 - Identical
DIN EN ISO 14644-14 E : 2017 - Identical
PN EN ISO 14644-14 : 2016 - Identical
DIN EN ISO 14644-14 : 2017 - Identical
NF EN ISO 14644-14 : 2016 - Identical
UNI EN ISO 14644-14 : 2016 - Identical
NBN EN ISO 14644-14 : 2016 - Identical
NEN EN ISO 14644-14 : 2016 - Identical
