SS-EN ISO 14644-14 : 2016現(xiàn)行

Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration

出版：Standardiserings-Kommissionen I Sverige

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基本信息

標(biāo)準(zhǔn)編號： SS-EN ISO 14644-14 : 2016

標(biāo)準(zhǔn)類別：Standard

出版單位：Standardiserings-Kommissionen I Sverige

標(biāo)準(zhǔn)頁數(shù)：0

標(biāo)準(zhǔn)簡介

This part of ISO 14644 specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1.

等同采用的國際標(biāo)準(zhǔn)

ISO 14644-14 : 2016 - Identical

EN ISO 14644-14 : 2016 - Identical

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SS-EN ISO 14644-14 : 2016現(xiàn)行

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