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UNI EN ISO 14644-14 : 2016現(xiàn)行
CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 14: ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT BY AIRBORNE PARTICLE CONCENTRATION
出版：Ente Nazionale Italiano di Unificazione (UNI)
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標(biāo)準(zhǔn)編號： UNI EN ISO 14644-14 : 2016
標(biāo)準(zhǔn)類別：Standard
出版單位：Ente Nazionale Italiano di Unificazione (UNI)
標(biāo)準(zhǔn)頁數(shù)：0
標(biāo)準(zhǔn)簡介
Defines a methodology to assess the suitability of equipment for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1.
