ISO/DIS 14644-14 : 50.60 (2016)被替代
CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 14: ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT BY AIRBORNE PARTICLE CONCENTRATION
出版：International Organization for Standardization
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基本信息
標準編號： ISO/DIS 14644-14 : 50.60 (2016)
標準類別：Standard
出版單位：International Organization for Standardization
標準頁數：0
標準簡介
Defines a methodology to assess the suitability of equipment (e. g. machinery, measuring equipment, process equipment, components, tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1.
替代本標準的新標準
