NBN EN 62047-2:2007現行
Semiconductor Devices - Micro-electromechanical Devices - Part 2: Tensile Testing Method Of Thin Film Materials
出版：Belgian Standards
專家解讀視頻
Specifies the method for tensile testing of thin film materials with length and width under 1 mm and thickness under 10[mu]m, which are main structural materials for micro-electromechanical systems (MEMS), micromachines and similar devices.
DIN EN 62047-2 : 2007 - Identical
BS EN 62047-2 : 2006 - Identical
I.S. EN 62047-2:2006 - Identical
DIN EN 62047-2 : 2007 - Identical
BS EN 62047-2:2006 - Identical
DIN EN 62047-2 (2007-02) - Identical
NF EN 62047-2:2006 - Identical
I.S. EN 62047-2:2006 - Identical
