SEMI MF1535:2015(R2021)現行
Test Method for Carrier Recombination Lifetime in Electronic-Grade Silicon Wafers by Noncontact Measurement of Photoconductivity Decay by Microwave Reflectance
出版：Semiconductor Equipment & Materials Institute
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基本信息
標準編號： SEMI MF1535:2015(R2021)
標準類別：Test Method
出版單位：Semiconductor Equipment & Materials Institute
標準頁數：0
標準簡介
If the free carrier density of an electronic-grade semiconductor is not too high, the carrier recombination lifetime is controlled by impurity centers that have energies located in the forbidden energy gap.
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