
Semiconductor devices - Micro-electromechanical devices Part 1: Terms and definitions
出版:International Electrotechnical Committee

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基本信息
標準編號: IEC 62047-1 Ed. 2.0
發布時間:2016/1/6 0:00:00
標準類別:Standard
出版單位:International Electrotechnical Committee
標準頁數:66
標準簡介
IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition: a) removal of ten terms; b) revision of twelve terms; c) addition of sixteen new terms.
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