I.S. EN ISO 14644-10:2013現行
Cleanrooms and Associated Controlled Environments Part 10: Classification of Surface Cleanliness by Chemical Concentration (iso 14644-10:2013)
出版：National Standards Authority of Ireland
專家解讀視頻
基本信息
標準編號： I.S. EN ISO 14644-10:2013
發布時間：2013/3/15 0:00:00
標準類別：Standard
出版單位：National Standards Authority of Ireland
標準頁數：43
標準簡介
Describes the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles).
