ISO 14644-15:2017現行
Cleanrooms and associated controlled environments Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
出版：International Organization for Standardization
專家解讀視頻
This document provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO 14644-8).
UNI EN ISO 14644-15:2018 - Identical
SS-EN ISO 14644-15 : 2017 - Identical
DIN EN ISO 14644-15 : 2016 - Identical
EN ISO 14644-15 : 2017 - Identical
DIN EN ISO 14644-15 : 2018 - Identical
SN EN ISO 14644-15:2018 - Identical
UNE-EN ISO 14644-15:2018 - Identical
UNI EN ISO 14644-15:2018 - Identical
SS-EN ISO 14644-15 : 2017 - Identical
SN EN ISO 14644-15:2018 - Identical
EN ISO 14644-15 : 2017 - Identical
DIN EN ISO 14644-15 : 2018 - Identical
