SN EN ISO 14644-15:2018現(xiàn)行

Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment andmaterials by airborne chemical concentration (ISO 14644-15:2017)

出版：Swiss Standards

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基本信息

標(biāo)準(zhǔn)編號： SN EN ISO 14644-15:2018

標(biāo)準(zhǔn)類別：Standard

出版單位：Swiss Standards

標(biāo)準(zhǔn)頁數(shù)：0

標(biāo)準(zhǔn)簡介

ISO 14644-15:2017 provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO 14644-8).

等同采用的國際標(biāo)準(zhǔn)

ISO 14644-15 : 2017 - Identical

EN ISO 14644-15 : 2017 - Identical

ISO 14644-15 : 2017 - Identical

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SN EN ISO 14644-15:2018現(xiàn)行

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