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CEI EN 62047-4 : 2011現(xiàn)行

SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 4: GENERIC SPECIFICATION FOR MEMS

出版：Comitato Elettrotecnico Italiano

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基本信息
標(biāo)準(zhǔn)編號(hào)： CEI EN 62047-4 : 2011
發(fā)布時(shí)間：2011/1/1 0:00:00
標(biāo)準(zhǔn)類別：Standard
出版單位：Comitato Elettrotecnico Italiano
標(biāo)準(zhǔn)頁(yè)數(shù)：26
標(biāo)準(zhǔn)簡(jiǎn)介

Defines generic specifications for micro-electromechanical Systems made by semiconductors, which are the basis for specifications given in other parts of this series for various types of MEMS applications such as sensors, RF MEMS, excluding optical MEMS, bio MEMS, micro TAS, and power MEMS.

等同采用的國(guó)際標(biāo)準(zhǔn)

EN 62047-4 : 2010 - Identical

IEC 62047-4 : 1.0 - Identical