EN 62047-4 : 2010現行
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 4: GENERIC SPECIFICATION FOR MEMS
出版：European Committee for Standards - Electrical
專家解讀視頻
基本信息
標準編號： EN 62047-4 : 2010
標準類別：Standard
出版單位：European Committee for Standards - Electrical
標準頁數：0
標準簡介
Specifies generic specifications for micro-electromechanical systems (MEMS) made by semiconductors, which are the basis for specifications given in other parts of this series for various types of MEMS applications such as sensors, RF MEMS, excluding optical MEMS, bio MEMS, micro TAS, and power MEMS.
