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IEC 62047-1 Ed. 2.0現(xiàn)行
Semiconductor devices - Micro-electromechanical devices Part 1: Terms and definitions
出版：International Electrotechnical Committee
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基本信息
標(biāo)準(zhǔn)編號： IEC 62047-1 Ed. 2.0
發(fā)布時間：2016/1/6 0:00:00
標(biāo)準(zhǔn)類別：Standard
出版單位：International Electrotechnical Committee
標(biāo)準(zhǔn)頁數(shù)：66
標(biāo)準(zhǔn)簡介
IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition: a) removal of ten terms; b) revision of twelve terms; c) addition of sixteen new terms.
本標(biāo)準(zhǔn)替代的舊標(biāo)準(zhǔn)
