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UNI EN ISO 14644-10 : 2013現(xiàn)行

CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 10: CLASSIFICATION OF SURFACE CLEANLINESS BY CHEMICAL CONCENTRATION

出版：Ente Nazionale Italiano di Unificazione (UNI)

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基本信息
標(biāo)準(zhǔn)編號(hào)： UNI EN ISO 14644-10 : 2013
標(biāo)準(zhǔn)類別：Standard
出版單位：Ente Nazionale Italiano di Unificazione (UNI)
標(biāo)準(zhǔn)頁(yè)數(shù)：0
標(biāo)準(zhǔn)簡(jiǎn)介

Describes the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles).

等同采用的國(guó)際標(biāo)準(zhǔn)

EN ISO 14644-10 : 2013 - Identical

ISO 14644-10 : 2013 - Identical