SS-EN ISO 14644-10 : 2013現(xiàn)行
Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration
出版：Standardiserings-Kommissionen I Sverige
專家解讀視頻
基本信息
標準編號： SS-EN ISO 14644-10 : 2013
標準類別：Standard
出版單位：Standardiserings-Kommissionen I Sverige
標準頁數(shù)：0
標準簡介
ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles).
等同采用的國際標準
EN ISO 14644-10 : 2013 - Identical
ISO 14644-10 : 2013 - Identical
ISO 14644-10 : 2013 - Identical
