DIN 28429 (1985-08)被替代
Vacuum Technology - Acceptance Specifications For Sputter Ion Pumps
出版：German Institute for Standardisation (Deutsches Institut für Normung)
專家解讀視頻
基本信息
標準編號： DIN 28429 (1985-08)
發布時間：1985/8/1 0:00:00
標準類別：Standard
出版單位：German Institute for Standardisation (Deutsches Institut für Normung)
標準頁數：5
標準簡介
Applies to sputter ion pumps 1) (hereinafter briefly referred to as pumps) with a nominal volume flow rate greater than 10l.s-1 and with the pressure range for the determination of the volume flow rate lying between 1,5.10-5 mbar and 1.10-9 mbar.
標準備注
Suspended until publication of a revised English text, due to a
new German edition.
(01/2004)
替代本標準的新標準
