DS EN ISO 14644-10:2013現行
Cleanrooms And Associated Controlled Environments - Part 10: Classification Of Surface Cleanliness By Chemical Concentration
出版：Danish Standards
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基本信息
標準編號： DS EN ISO 14644-10:2013
發布時間：2013/4/2 0:00:00
標準類別：Standard
出版單位：Danish Standards
標準頁數：44
標準簡介
Specifies the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). Pertains to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.
