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SEMI MF1811:2016(R2021)現(xiàn)行
Guide for Estimating the Power Spectral Density Function and Related Finish Parameters from Surface Profile Data
出版：Semiconductor Equipment & Materials Institute
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標(biāo)準(zhǔn)編號(hào)： SEMI MF1811:2016(R2021)
標(biāo)準(zhǔn)類別：Guide
出版單位：Semiconductor Equipment & Materials Institute
標(biāo)準(zhǔn)頁數(shù)：0
標(biāo)準(zhǔn)簡介
There is some confusion in the roughness-measurement community concerning the use of estimators and the calculation of power spectral densities (PSDs) from discrete data sets.
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