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Cleanrooms And Associated Controlled Environments - Part 10: Classification Of Surface Cleanliness By Chemical Concentration (Iso 14644-10:2013)
出版:Norwegian Standards (Norges Standardiseringsforbund)

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基本信息
標(biāo)準(zhǔn)編號(hào): NS EN ISO 14644-10:2013
發(fā)布時(shí)間:2013/6/1 0:00:00
標(biāo)準(zhǔn)類別:Standard
出版單位:Norwegian Standards (Norges Standardiseringsforbund)
標(biāo)準(zhǔn)頁(yè)數(shù):40
標(biāo)準(zhǔn)簡(jiǎn)介
Centers on the classification system of the surface contamination in cleanrooms due to chemical compounds or elements (including molecules, ions, atoms and particles).