
Semiconductor Devices - Microelectromechanical Devices Part 22: Electromechanical Tensile Test Method for Conductive Thin Films on Flexible Substrates
出版:National Standards Authority of Ireland

專家解讀視頻
基本信息
標準編號: I.S. EN 62047-22:2014
發布時間:2014/10/24 0:00:00
標準類別:Standard
出版單位:National Standards Authority of Ireland
標準頁數:32
標準簡介
Defines a tensile test method to measure electromechanical properties of conductive thin micro-electromechanical systems (MEMS) materials bonded on non-conductive flexible substrates.
等同采用的國際標準
EN 62047-22:2014 - Identical