
Cleanrooms and Associated Controlled Environments Part 14: Assessment of Suitability for use of Equipment by Airborne Particle Concentration (iso/dis 14644-14)
出版:National Standards Authority of Ireland

專家解讀視頻
Describes a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1.
EN ISO 14644-14:2016 - Identical
ISO 14644-14 : 2016 - Identical
EN ISO 14644-14 : 2016 - Identical