I.S. EN 62047-21:2014現行
Semiconductor Devices - Microelectromechanical Devices Part 21: Test Method for Poisson's Ratio of Thin Film Mems Materials
出版：National Standards Authority of Ireland
專家解讀視頻
基本信息
標準編號： I.S. EN 62047-21:2014
發布時間：2014/10/27 0:00:00
標準類別：Standard
出版單位：National Standards Authority of Ireland
標準頁數：38
標準簡介
Defines the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 [mu]m.
