
Semiconductor Devices - Micro-Electromechanical Devices - Part 22: Electromechanical Tensile Test Method For Conductive Thin Films On Flexible Substrates
出版:British Standards Institution

專家解讀視頻
基本信息
標準編號: BS EN 62047-22:2014
發布時間:2014/10/31 0:00:00
標準類別:Standard
出版單位:British Standards Institution
標準頁數:14
標準簡介
Defines a tensile test method to measure electromechanical properties of conductive thin micro-electromechanical systems (MEMS) materials bonded on non-conductive flexible substrates.
等同采用的國際標準
EN 62047-22:2014 - Identical