
Semiconductor devices - Stress migration test standard Part 1: Copper stress migration test standard
出版:International Electrotechnical Committee

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基本信息
標準編號: IEC 62880-1 Ed. 1.0
發布時間:2017/8/23 0:00:00
標準類別:Standard
出版單位:International Electrotechnical Committee
標準頁數:28
標準簡介
Specifies a constant temperature (isothermal) aging method for testing copper (Cu) metallization test structures on microelectronics wafers for susceptibility to stress-induced voiding (SIV).