I.S. EN ISO 14644-15:2017現行
Cleanrooms and Associated Controlled Environments Part 15: Assessment of Suitability for use of Equipment and Materials by Airborne Chemical Concentration (iso 14644-15:2017)
出版：National Standards Authority of Ireland
專家解讀視頻
Defines requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration.
EN ISO 14644-15 : 2017 - Identical
ISO 14644-15 : 1ED 2017 - Identical
EN ISO 14644-15 : 2017 - Identical
