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IEC 62047-15 Ed. 1.0現行

Semiconductor devices - Micro-electromechanical devices Part 15: Test method of bonding strength between PDMS and glass

出版:International Electrotechnical Committee

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基本信息
標準編號: IEC 62047-15 Ed. 1.0
發布時間:2015/3/5 0:00:00
標準類別:Standard
出版單位:International Electrotechnical Committee
標準頁數:21
標準簡介

IEC 62047-15:2015 describes test method for bonding strength between poly dimethyl siloxane (PDMS) and glass. Silicone-based rubber, PDMS, is used for building of chip-based microfluidic devices fabricated using lithography and replica moulding processes. The problem of bonding strength is mainly for high pressure applications as in the case of certain peristaltic pump designs where an off chip compressed air supply is used to drive the fluids in micro channels created by a twin layer, one formed by bondage between glass with replica moulded PDMS and another between PDMS and PDMS. Also, in case of systems having pneumatic microvalves, a relatively high level of bonding particularly between two replica moulded layers of PDMS becomes quite necessary. Usually there is a leakage and debonding phenomena between interface of bonded areas, which causes unstability and shortage of lifetime for MEMS devices. This standard specifies general procedures on bonding test of PDMS and glass chip.