IEC 62047-29 Ed. 1.0現行
Semiconductor devices - Micro-electromechanical devices Part 29: Electromechanical relaxation test method for freestanding conductive thin-films under room temperature
出版：International Electrotechnical Committee
專家解讀視頻
基本信息
標準編號： IEC 62047-29 Ed. 1.0
發布時間：2017/11/22 0:00:00
標準類別：Standard
出版單位：International Electrotechnical Committee
標準頁數：16
標準簡介
Describes a relaxation test method for measuring electromechanical properties of freestanding conductive thin films for micro-electromechanical systems (MEMS) under controlled strain and room temperature.
