
Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS
出版:American Society for Testing and Materials

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基本信息
標準編號: ASTM E1438-06
發布時間:2006/11/1 0:00:00
標準類別:Standard
出版單位:American Society for Testing and Materials
標準頁數:2
標準簡介
CONTAINED IN VOL. 03.05, 2006Provides the SIMS analyst with a method for determining the width of interfaces from SIMS sputtering data obtained from analyses of layered specimens.
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