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ISO 14644-2:2015現(xiàn)行

Cleanrooms and associated controlled environments Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration

出版：International Organization for Standardization

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基本信息

標(biāo)準(zhǔn)編號： ISO 14644-2:2015

發(fā)布時間：2015/12/9 0:00:00

標(biāo)準(zhǔn)類別：Standard

出版單位：International Organization for Standardization

標(biāo)準(zhǔn)頁數(shù)：14

標(biāo)準(zhǔn)簡介

Provides requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.

本標(biāo)準(zhǔn)替代的舊標(biāo)準(zhǔn)

FED STD 209 : E

ISO/DIS 14644-2 : 60.00 (2015)

ISO 14644-2 : 2000

ISO 14644-2:2000

ISO/FDIS 14644-2

等同采用的國際標(biāo)準(zhǔn)

SANS 14644-2 : 1ED 2003 - Identical

PN EN ISO 14644-2 : 2016 - Identical

DS EN ISO 14644-2 : 2015 - Identical

AS ISO 14644.2:2017 - Identical

ABNT NBR ISO 14644-2:2019 - Identical