
Semiconductor Devices - Micro-Electromechanical Devices - Part 22: Electromechanical Tensile Test Method For Conductive Thin Films On Flexible Substrates
出版:Danish Standards

專家解讀視頻
Defines a tensile test method to measure electromechanical properties of conductive thin micro-electromechanical systems (MEMS) materials bonded on non-conductive flexible substrates.
EN 62047-22:2014 - Identical