DS EN ISO 14644-15 : 2017現(xiàn)行

CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 15: ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT AND MATERIALS BY AIRBORNE CHEMICAL CONCENTRATION (ISO 14644-15:2017)

出版：Danish Standards

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標(biāo)準(zhǔn)編號(hào)： DS EN ISO 14644-15 : 2017

標(biāo)準(zhǔn)類別：Standard

出版單位：Danish Standards

標(biāo)準(zhǔn)頁數(shù)：0

標(biāo)準(zhǔn)簡(jiǎn)介

Gives requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO 14644 8).

等同采用的國(guó)際標(biāo)準(zhǔn)

ISO 14644-15 : 1ED 2017 - Identical

EN ISO 14644-15 : 2017 - Identical

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DS EN ISO 14644-15 : 2017現(xiàn)行

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