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I.S. EN 62047-21:2014現(xiàn)行
Semiconductor Devices - Microelectromechanical Devices Part 21: Test Method for Poisson's Ratio of Thin Film Mems Materials
出版：National Standards Authority of Ireland
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標(biāo)準(zhǔn)編號(hào)： I.S. EN 62047-21:2014
發(fā)布時(shí)間：2014/10/27 0:00:00
標(biāo)準(zhǔn)類別：Standard
出版單位：National Standards Authority of Ireland
標(biāo)準(zhǔn)頁(yè)數(shù)：38
標(biāo)準(zhǔn)簡(jiǎn)介
Defines the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 [mu]m.
