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UNI EN ISO 14644-13 : 2018現(xiàn)行

CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 13: CLEANING OF SURFACES TO ACHIEVE DEFINED LEVELS OF CLEANLINESS IN TERMS OF PARTICLE AND CHEMICAL CLASSIFICATIONS

出版：Ente Nazionale Italiano di Unificazione (UNI)

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基本信息
標(biāo)準(zhǔn)編號(hào)： UNI EN ISO 14644-13 : 2018
標(biāo)準(zhǔn)類(lèi)別：Standard
出版單位：Ente Nazionale Italiano di Unificazione (UNI)
標(biāo)準(zhǔn)頁(yè)數(shù)：0
標(biāo)準(zhǔn)簡(jiǎn)介

Provides guidelines for cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom.

等同采用的國(guó)際標(biāo)準(zhǔn)

EN ISO 14644-13 : 2017 - Identical

ISO 14644-13 : 2017 - Identical

ISO 14644-13 : 2017 - Identical

EN ISO 14644-13 : 2017 - Identical