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NEN EN ISO 14644-8:2013現(xiàn)行

Cleanrooms And Associated Controlled Environments - Part 8: Classification Of Air Cleanliness By Chemical Concentration (Acc)

出版:Nederlands Normalisatie Instituut

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基本信息
標(biāo)準(zhǔn)編號(hào): NEN EN ISO 14644-8:2013
發(fā)布時(shí)間:2013/3/1 0:00:00
標(biāo)準(zhǔn)類別:Standard
出版單位:Nederlands Normalisatie Instituut
標(biāo)準(zhǔn)頁(yè)數(shù):22
標(biāo)準(zhǔn)簡(jiǎn)介

Describes the classification of airborne molecular contamination (AMC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time weighted factors within the specification for classification.

本標(biāo)準(zhǔn)替代的舊標(biāo)準(zhǔn)

NEN EN ISO 14644-8:2006