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FED STD 209 Revision E被替代
Airborne Particulate Cleanliness Classes In Cleanrooms And Clean Zones - Revision E
出版：US Military Specs/Standards/Handbooks
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基本信息
標(biāo)準(zhǔn)編號(hào)： FED STD 209 Revision E
發(fā)布時(shí)間：1992/9/11 0:00:00
標(biāo)準(zhǔn)類(lèi)別：Standard
出版單位：US Military Specs/Standards/Handbooks
標(biāo)準(zhǔn)頁(yè)數(shù)：55
標(biāo)準(zhǔn)簡(jiǎn)介
Gives classes of air cleanliness for airborne particulate levels in cleanrooms and zones. Gives methods for class verification and monitoring of air cleanliness. Coverage includes: airborne particulate cleanliness classes and U descriptions; verification and monitoring of airborne particulate cleanliness. Also contains detailed definitions and appendices.
標(biāo)準(zhǔn)備注
E Notice 1 - Notice of Cancellation/Superseded by ISO 14644-1 and
ISO 14644-2
(03/2002)
本標(biāo)準(zhǔn)替代的舊標(biāo)準(zhǔn)
本標(biāo)準(zhǔn)修訂后的版本
