ISO/DIS 14644-5被替代
Cleanrooms And Associated Controlled Environments - Part 5: Operations
出版：International Organization for Standardization
專家解讀視頻
基本信息
標準編號： ISO/DIS 14644-5
標準類別：Draft
出版單位：International Organization for Standardization
標準頁數：0
標準簡介
Describes basic requirements for cleanroom operations.It is intended for those planning to use and operate acleanroom.
替代本標準的新標準
等同采用的國際標準
NEN EN ISO 14644-5:2004 - Identical
