
Cleanrooms and associated controlled environments Test methods (ISO 14644-3:2005, MOD)
出版:Standards Australia

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基本信息
標準編號: AS/NZS 14644.3:2009
發布時間:2009/3/10 0:00:00
標準類別:Standard
出版單位:Standards Australia
標準頁數:67
標準簡介
Adopts ISO 14644-3:2005 with national modifications to provide test methods for unidirectional and non-unidirectional flow cleanrooms.
本標準替代的舊標準
等同采用的國際標準
ISO 14644-3:2005 - Modified