CEI EN 62047-21 : 2016現行
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 21: TEST METHOD FOR POISSON'S RATIO OF THIN FILM MEMS MATERIALS
出版：Comitato Elettrotecnico Italiano
專家解讀視頻
基本信息
標準編號： CEI EN 62047-21 : 2016
標準類別：Standard
出版單位：Comitato Elettrotecnico Italiano
標準頁數：0
標準簡介
Defines the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 [mu]m.
