
Cleanrooms and associated controlled environments Classification and air cleanliness
出版:Standards Australia

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基本信息
標準編號: AS/NZS ISO 14644.1:2002
發布時間:2002/4/16 0:00:00
標準類別:Standard
出版單位:Standards Australia
標準頁數:20
標準簡介
Covers the classification of air cleanliness of cleanrooms and associated controlled environments exclusively in terms of concentrations of airborne particles. This Standard is identical with and has been reproduced from ISO 14644-1:1999.