CEI EN 62047-3 : 2007現行
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 3: THIN FILM STANDARD TEST PIECE FOR TENSILE TESTING
出版：Comitato Elettrotecnico Italiano
專家解讀視頻
基本信息
標準編號： CEI EN 62047-3 : 2007
發布時間：2007/1/1 0:00:00
標準類別：Standard
出版單位：Comitato Elettrotecnico Italiano
標準頁數：16
標準簡介
Describes the standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10 [mu]m, which are main structural materials for micro-electromechanical systems (MEMS), micromachines and similar devices.
