DIN EN ISO 14644-9 E : 2012現行
CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 9: CLASSIFICATION OF SURFACE CLEANLINESS BY PARTICLE CONCENTRATION (ISO 14644-9:2012)
出版：German Institute for Standardisation (Deutsches Institut für Normung)
專家解讀視頻
基本信息
標準編號： DIN EN ISO 14644-9 E : 2012
發布時間：2012/1/1 0:00:00
標準類別：Standard
出版單位：German Institute for Standardisation (Deutsches Institut für Normung)
標準頁數：32
標準簡介
Describes the classification of cleanliness levels on solid surfaces by particle concentration in cleanrooms and associated controlled environment applications.
