DS EN 62047-21:2014現行
Semiconductor Devices - Micro-Electromechanical Devices - Part 21: Test Method For Poisson's Ratio Of Thin Film Mems Materials
出版：Danish Standards
專家解讀視頻
基本信息
標準編號： DS EN 62047-21:2014
發布時間：2014/11/20 0:00:00
標準類別：Standard
出版單位：Danish Standards
標準頁數：19
標準簡介
Defines the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 [mu]m.
等同采用的國際標準
EN 62047-21:2014 - Identical
