
Cleanrooms And Associated Controlled Environments - Part 8: Classification Of Airborne Molecular Contamination
出版:International Organization for Standardization

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基本信息
標準編號: ISO/DIS 14644-8 (2006)
標準類別:Draft
出版單位:International Organization for Standardization
標準頁數:0
標準簡介
Covers the classification of airborne molecular contamination(AMC) in cleanrooms and associated controlled environments in terms of airborne concentrations of specific chemicals species (individual, group or category) and provides a protocol to include test methods, analysis and time weighted factors within the specification for classification.
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