ASTM F1711-96(2002)被替代
Standard Practice for Measuring Sheet Resistance of Thin Film Conductors for Flat Panel Display Manufacturing Using a Four-Point Probe
出版：American Society for Testing and Materials
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基本信息
標準編號： ASTM F1711-96(2002)
發布時間：2002/12/10 0:00:00
標準類別：Standard
出版單位：American Society for Testing and Materials
標準頁數：9
標準簡介
CONTAINED IN VOL. 10.04, 2007 Provides methods for measuring sheet electrical resistance of sputtered thin conductive films deposited on large insulating substrates used in making flat panel information displays.
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