DIN EN 62047-3 (2007-02)現(xiàn)行
Semiconductor Devices - Micro-electromechanical Devices - Part 3: Thin Film Standard Test Piece For Tensile-testing
出版：German Institute for Standardisation (Deutsches Institut für Normung)
專家解讀視頻
Specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10[mu]m, which are main structural materials for microelectromechanical systems (MEMS), micromachines and similar devices.
Supersedes DIN IEC 62047-3. (02/2007)
NBN EN 62047-3:2007 - Identical
IEC 62047-3 Ed. 1.0 - Identical
BS EN 62047-3:2006 - Identical
I.S. EN 62047-3:2006 - Identical
NF EN 62047-3:2006 - Identical
