ISO/DIS 14644-15 : 60.00 (2017)被替代
CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 15: ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT AND MATERIALS BY AIRBORNE CHEMICAL CONCENTRATION
出版：International Organization for Standardization
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基本信息
標準編號： ISO/DIS 14644-15 : 60.00 (2017)
標準類別：Standard
出版單位：International Organization for Standardization
標準頁數：0
標準簡介
Defines requirements and guidance for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (ISO 14644-8).
替代本標準的新標準
