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Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS
出版:American Society for Testing and Materials

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標(biāo)準(zhǔn)編號(hào): ASTM E1438-06
發(fā)布時(shí)間:2006/11/1 0:00:00
標(biāo)準(zhǔn)類別:Standard
出版單位:American Society for Testing and Materials
標(biāo)準(zhǔn)頁(yè)數(shù):2
標(biāo)準(zhǔn)簡(jiǎn)介
CONTAINED IN VOL. 03.05, 2006Provides the SIMS analyst with a method for determining the width of interfaces from SIMS sputtering data obtained from analyses of layered specimens.
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