FED STD 209 Revision E (Invalid Record)被替代
Airborne Particulate Cleanliness Classes In Cleanrooms And Clean Zones
出版：US Military Specs/Standards/Handbooks
專家解讀視頻
基本信息
標準編號： FED STD 209 Revision E (Invalid Record)
標準類別：Standard
出版單位：US Military Specs/Standards/Handbooks
標準頁數：0
標準簡介
Gives classes of air cleanliness for airborne particulate levels in cleanrooms and zones. Gives methods for class verification and monitoring of air cleanliness. Coverage includes: airborne particulate cleanliness classes and U descriptions; verification and monitoring of airborne particulate cleanliness. Also contains detailed definitions and appendices.
標準備注
E Notice 1 - Notice of Cancellation/Superseded by ISO 14644-1 and
ISO 14644-2
(03/2002)
