ISO/DIS 14644-13 : 60.00 (2017)被替代
CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 13: CLEANING OF SURFACES TO ACHIEVE DEFINED LEVELS OF CLEANLINESS IN TERMS OF PARTICLE AND CHEMICAL CLASSIFICATIONS
出版：International Organization for Standardization
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基本信息
標準編號： ISO/DIS 14644-13 : 60.00 (2017)
標準類別：Standard
出版單位：International Organization for Standardization
標準頁數：0
標準簡介
Describes guidance on the assessment of cleaning methods for achieving the required surface cleanliness by particle concentration (SCP) and surface cleanliness by chemical concentration (SCC) classes and which techniques should be considered to achieve these specified levels.
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