EN 62047-2 : 2006現行
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 2: TENSILE TESTING METHOD OF THIN FILM MATERIALS
出版：European Committee for Standards - Electrical
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基本信息
標準編號： EN 62047-2 : 2006
標準類別：Standard
出版單位：European Committee for Standards - Electrical
標準頁數：0
標準簡介
Specifies the method for tensile testing of thin film materials with length and width under 1 mm and thickness under 10[mu]m, which are main structural materials for micro-electromechanical systems (MEMS), micromachines and similar devices.
